Flexible OEM unit for lifetime measurements at a variety of different samples ranging form mono to multi silicon ingots, from bare wafer to process control of wafer with different layers. Standard interface for easy connection to many handling or automatisation system.

MDP linescan - inline line scanner or single spot measurement

Measurement of minority carrier lifetime and resistivity linescans at µ-PCD or steady state excitation conditions are in the focus of this small tool. OEM unit for the integration in production lines for poly- or monocrystalline silicon wafers at different preparation stages up to devices, bricks or ingots. Small size and standard automation interfaces allow for easy integration. Focus is put on long reliability and precision of measurement results.

Detail

  • allows for single wafer controll

  • parameter autosetting

  • monitoring of material, process quality and stability

sample: raw poly pieces, wafer any size, ingots, cells

  • sample size: anything above 10 x 10 mm²

  • resistivity: 0.1 - 10³ Ohm cm

  • conduction type: p, n

  • material: silicon wafer, epi layers, partially or fully processed wafers, compound semiconductors

  • properties measureable: lifetime (steady state or non equilibrium(μ-PCD) selectable),