Full electrical wafer characterisation at up to one wafer a second allow for single wafer control, measuring parameters like lifetime and resistivtiy. Which leeds to a so far not seen quality of process control, yield and process improvement as well as a fast upramping of any new fab or process. Suitable for measurement of material quality of outgoing or incoming wafers as well as identification of crystallisation problems at wafer level for instance in PV industry.

• contactless destruction free electrical semiconductor characterisation

• production integrated high speed wafer mapping

• suitable for single wafer investigation

• complete two dimensional full wafer map, at one wafer a second

• mapping capability of: minority carrier lifetime

• linescan of: resistivity

• advanced sensitivity for visualisation of so far invisible defects