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Flexible OEM unit for lifetime measurements at a variety of different samples ranging form mono to multi silicon bricks, from as grown wafers to process control of wafers with different layers. Standard software interface for easy connection to many handling or automatisation systems.
MDP linescan - inline line scanner or single spot measurement
MDPlinescan is designed as an easy to integrate OEM unit for integration into a variety of automated inspection lines. Key measurements are carrier lifetime scans on the fly. Samples are usually carried by a conveyor belt or robot system underneath the measurement head. Application examples range from brick to wafer inspection with measurement speed of less than one second per wafer. Incoming material quality investigation in cell production lines are frequent application cases as well as process quality check after passivation and diffusion, within many other specialised application possibilities. Easy to integrate only ethernet connection and power is needed.
MDPlinescan w
Includes additional resistivity measurement option.
Facts
allows for single wafer investigation
recipe based measurements
monitoring of material quality, process integrity and stability
Advantages
Measurement of minority carrier lifetime and resistivity lines cans at µ-PCD or steady state excitation conditions are in the focus of this small tool.
OEM unit for the integration in production lines for multi- or monocrystalline silicon wafers at different preparation stages up to devices, bricks or ingots.
Small size and standard automation interfaces allows for easy integration. Focus is put on long reliability and precision of measurement results.
Detail
allows for single wafer control
recipe based measurements
monitoring of material, process quality and stability
Specifications
sample: raw multi or mono wafers of multiple sizes like 156 mm², bricks, cells
sample size: above 50 x 50 mm²
resistivity: 0.2 - 10³ Ohm cm
conduction type: p, n
material: silicon wafers, partially or fully processed wafers, compound semiconductors and beyond
measurable properties: carrier lifetime
hardware interface: ethernet
dimension: 174 x 107 x 205 mm, weight: 3 kg
power: 24 V DC, 2 A
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Freiberg Instruments GmbH | Am St. Niclas Schacht 13 | D-09599 Freiberg/Germany || t +49 3731 41954 0 | f +49 3731 41954 14 || contact | how to find us || creation: 599media GmbH