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Low cost table top lifetime measurement system for characterisation of a variety of different silicon samples at different preparation stages. Without built-in automatisation, optional hand operated z-axis for thicker samples. Standard software for result visualisation. As an OEM version, the tool is as well suited for inline linescan applications.
MDP spot - table top single spot or inline linescan measurements
Measurement of minority carrier lifetime and resistivity linescans at µ-PCD or steady state excitation conditions are in the focus of this small tool.
Table top unit for single point measurements of poly- or monocrystalline silicon wafers up to final devices of different preparation stages. Small size, low price and easy to use. Comes with a basic software for result visualisation.
Facts
contactless destruction free electrical semiconductor characterisation
bench top based single spot measurement
measurement of: minority carrier lifetime, photoconductivity, resistivity (option)
advanced sensitivity for visualisation of so far invisible defects
Detail
allows for single wafer controll
parameter autosetting
monitoring of material, process quality and stability
sample: raw poly pieces, wafer any size, ingots, cells
sample size: anything above 10 x 10 mm²
resistivity: 0.1 - 10³ Ohm cm
conduction type: p, n
material: silicon wafer, epi layers, partially or fully processed wafers, compound semiconductors
properties measureable: lifetime (steady state or non equilibrium(μ-PCD) selectable)
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