is an advanced technology with a so far unsurpassed combination of sensitivity, speed and resolution for fab and lab applications. It measures electrical parameters like minority carrier lifetime, photoconductivity and resistivity contactless and destruction free.
The advanced method MDP is well suited for both, defect investigation by e.g. injection dependent minority carrier lifetime measurements, as well as mapping of wafers or even ingots for inline metrology. MDP has a variety of advantages in sensitivity, speed and resolution.