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MDP microwave detected photoconductivity
is a newly developed technology with a so far unsurpassed combination of sensitivity, speed and resolution for fab and lab applications. It measures electrical parameters like minority carrier lifetime, photoconductivity and resistivity contactless and destruction free.
The novel method MDP is well suited for both, defect investigation by e.g. injection dependent minority carrier lifetime measurements, as well as mapping of wafer or even ingots for inline metrology. MDP has a variety of advantages towards sensitivity, speed and resolution.
Overview
The performance of semiconductor devices depends fundamentally on key electrical parameters of the material and therefore also on defect densities and their electrical properties.
Besides MDP the two most important contact less lifetime measuring methods are QSSPC (quasi steady state photoconductivity) and µ-PCD (microwave detected photoconductive decay).
Electrical properties and defects of a large variety of semiconductor materials, devices and dielectric materials can be investigated contact less and destruction free with our novel method MDP (microwave detected photoconductivity).
Publications
A close connection between production and research is important for the development of new applications and technologies. So far a few topics were published.
News
Freiberg Instruments GmbH | Am St. Niclas Schacht 13 | D-09599 Freiberg/Germany || t +49 3731 41954 0 | f +49 3731 41954 14 || contact | how to find us || creation: 599media GmbH