Crystalline surface mapping

Though the surface of single crystals is rather uniform, there is often a slight fluctuation of the orientation in large specimen. Strain fields caused by lattice defects also influence the orientation of the surrounding material. The high speed and precision of the Omega Scan allows convenient surface mappings on single crystals. Another option is a mapping of the rocking curve of a reflection over the crystal surface. The width of the rocking curve is sensitive to internal strain caused by defects.

Surface orientation mapping of a Si-Ge wafer. Concentric circles indicate the growth rings of the crystal.
Mapping of the Rocking Curve half-width of a SiC crystal. Red indicates increased half-width.