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Mono- and Multi-crystalline wafer lifetime measurement device
State of the art system for topographic electrical characterization of multicrystalline bricks in fabs with high throughput....
Production integrated high speed wafer mapping of carrier lifetime. Single wafer topograms in less than one second a wafer.
Low cost table top lifetime measurement system for characterization of a variety of different silicon samples at different...
Mono- and Multi-crystalline wafer and brick lifetime measurement device
Flexible OEM unit for lifetime measurements at a variety of different samples ranging from mono- to multicrystalline silicon...
Microwave Detected Photo Induced Current Transient Spectroscopy
The minority carrier life time is sensitive for all kinds of electrically active defects in semiconductors and is therefore...
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benchtop PID test solution
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The PIDcon devices are designed to investigate the PID susceptibility for production monitoring of solar cells as well as tests...
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for ultra-fast crystal orientation and rocking curve measurements
flexible diffractometer for ultra-fast Omega Scan orientation determination
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discover the most convenient way of measuring orientation of single crystals
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A measuring technique for the orientation determination of crystals
In the EFG apparatuses for the orientation determination of single crystals, a special X-ray diffraction method is used. This method, developed by Prof. Bradaczek, has been called “Omega-Scan“.
The specimen is rotating at fixed measuring arrangement.
During one turn an X-ray diffraction diagram (= Omega-Scan diagram) is measured.
From the Omega-Scan diagram are calculated (e.g.): the inclination angle between one crystallographic axis (here: the a axis) and the reference plane as well as the direction of the inclination in this plane.
The specimen is turned by 360° around a certain axis, e.g., the surface normal. The X-ray source and the detector have to be adjusted depending on the crystal type to get a sufficient number of reflections per turn. The angular positions of these reflections are used to evaluate the orientation of the crystal lattice (completely described by three angles) with relation to the rotation axis. In order to relate the lattice orientation exactly to the surface of a crystal, the direction of the surface is checked by a laser beam. Also other relevant crystal reference faces or directions can be measured by optical tools in a similar way. This measuring technique enables to determine the orientation of arbitrary single crystals in any orientation range with high precision. Usually, a measuring time of some seconds (during one or a few turns of the specimen) is sufficient to get a reproducibility in the range of a few arc seconds. A special application of the Omega-Scan Method is the precision lattice-parameter determination, especially of cubic crystals.
Advantages of the Omega-Scan Method compared with other X-ray diffraction techniques are:
Stable and relative simple arrangement (X-ray tube and detector in fixed positions, only one measuring circle, no monochromator).
All the data necessary for the complete orientation determination are measured by one turn.
High precision at low measuring time.
From these reasons, the method is suited especially for serial measurements and industrial applications.