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Metrology solutions for the microelectronic industry

The microelectronic industry drives present global technological developments. It is one reason for the success of information and telecommunication technologies.

Facing the challenges in the microelectronic industry with top-notch metrology solutions

The microelectronic industry is probably one of the fastest growing industries worldwide. This has led to a highly competitive market and hence suppliers must be flexible, guaranteeing levels of quality and technical excellence that match the high standards needed for e.g. information and telecommunication applications. Freiberg Instruments is able to supply series as well as customized equipments, which are needed to assure high quality standards and high yields.

  • Defect monitoring and recognitionMDP tools enable the measurement of FeB, BO2, CrB, Mo and Ni in silicon

  • Measurement capability of very thin layersunsurpassed sensitivity with possiblity to measure thin epitaxial layers of only a few µm thickness

  • analog and mixed signalhigh detection sensitivity and versatility for production fault analysis on completely processed wafers

  • ideal for statistical process controlultrafast and very sensitive sensors for real time process and material quality control

  • 450 mm measurement capabilityavailable for all kind of sample sizes, including 450 mm wafers and bricks

Tools for Microelectronic Industry

MDPmap

Mono- and Multi-crystalline wafer lifetime measurement device

MDPspot

Low cost table top lifetime measurement system for characterization of a variety of different silicon samples at different preparation stages, without built-in automatization. Optional hand operated z-axis for thicker samples up to 156 mm bricks....

Applications for Microelectronic Industry

Iron concentration determination

The exact determination of the iron concentration is very important, since iron is one of the most abundant and also most detrimental defects in silicon. Hence it is necessary to measure the iron concentration as exactly and fast as possible, with a very high resolution and preferably inline.

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Marking and measuring of in-plane directions

In orientation measurements on large samples, the alingnment of the specimen within the instrument preselects a certain orientation. With respect to the sample main axis, we can define in-plane and out-of-plane components of the crystal orientation. The Omega Scan is capable of determining all...

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Photoconductivity measurements of implanted samples

Implantation of B and P are used for many applications in the microelectronic industry, but so far there was no method available to check the homogeneity of these implantations without contacting the samples and changing their properties due to the necessary annealing steps. The difficulties so far...

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