Optimize wafer alignment inline for higher productivity.
Ultra-fast hybrid X-ray optical metrology with proprietary algorithm
Full automation featuring SMIF Loadports suitable for OHT connection
Grows with your expansion: 70mm-230mm Wafersize flexibility
Materials
The XRDmap Pro Wafer Edition enables maximum value add by tuning subsequent processes such as epitaxy, lithography and implanting to the crystal orientation. This enables supplier process compliance and a smooth material flow by its ultra-fast measurement speed and seamless factory automation.
Si Ge GaAs GaN Ga₂O₃ Diamond InP and more
Features & Benefits
70–200mm
Wafer Size
0.003˚
Offcut magnitude precision
Flexible
Loading and communication options
Measured by
opt. sensors
Wafer Geometry
