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Electrical semiconductor characterization
Luminescence dating, research, dosimetry and more
Contamination monitor, beta-aerosol monitor, dose rate meter and more
for ultra-fast crystal orientation, crystal alignment in production, quality control, rocking curve measurements, material...
state-of-the-art XRD system for automatic single crystal ingot orientation, tilting and alignment for grinding
Wafer sorting, crystal orientation, resistivity, optical notch and flat determination
Flexible diffractometer for ultra-fast Omega Scan orientation determination
Smart diffractometer for ultra-fast Omega-scan of small samples.
Robust XRD equipment for fully automated in-line testing & alignment
for blanks, wafers & bars (AT, SC, TF, etc.)
three generations of X-ray engineers
in industrial production, R&D and more
discover the most convenient way of measuring orientation of single crystals
Mono- and Multi-crystalline wafer lifetime measurement device
Low cost table top lifetime measurement system for characterization of a variety of different silicon samples at different...
Mono- and Multi-crystalline wafer and brick lifetime measurement device
for production and quality control of monocrystalline Si ingots,bricks and wafers
Flexible OEM unit for lifetime measurements at a variety of different samples ranging from mono- to multicrystalline silicon...
for contactless and temperature dependent lifetime and LBIC measurements
High Resolution Resistivity Mapping Tool for process control and quality assurance measurements
The minority carrier life time is sensitive for all kinds of electrically active defects in semiconductors and is therefore...
MDP is an advanced technology with a so far unsurpassed combination of sensitivity, speed and resolution for fab and lab...
High sensitivity, high resolution surface photovoltage (SPV) measurement instrument
High sensitivity, high resolution surface photovoltage spectroscopy (SPS) instrument with a variable energy excitation source...
for quality control of bifacial PERC/PERC+ solar cells and more
portable in field PID tester for solar modules
user friendly and advanced operating software
The PIDcon devices are designed to investigate the PID susceptibility for production monitoring of solar cells as well as tests...
Learn more about the reasons for PID and the how the susceptibility of solar cells, mini modules and encapsulation materials can...
Our quality management system is an integrated process-oriented system with ISO 9001 certification.
2024/05/01 – 2027/04/30
In this project new methods for the inline characterization of Tandem solar cells based on MDP and SPS measurements are developed. Freiberg Instruments is working together with several research institutes and companies in this project to strengthen the German photovoltaic industry. Different layers and stacks of Perovskite and silicon are investigated and characterized.
Contact person:
Dr. Nadine Schüler (schueler(at)freiberginstruments.com)
2023/07/01 – 2026/03/06
The aim of this project is to an automated characterization method for process control of GaN based on Raman measurements. This project aims to secure and expand the competitiveness of the semiconductor location Freiberg. For this purpose, Freiberg Instruments will develop a demonstrator for a fully automated confocal Raman measurement. This is used to analyze residual stresses, which naturally occur in the crystals due to the hetero-epitaxy process used. In this way, excellent feedback should be achieved along the entire process chain. In addition, the MDP method (microwave-detected photoconductivity), which has been established for silicon up to now, is to be applied to large HVPE GaN crystals for the first time and the possibilities of defect analysis on this material are to be researched and demonstrated. Furthermore, the capabilities of the newly developed SPV spectrometer (surface photovoltage) are to be adapted to GaN so that this device can be used for material characterization.
2022/04/01 – 2025/03/31
Development of the MDP lifetime measurement technology for monocrystalline bricks with a format of up to 210 x 210 mm
The main goal of the "G12" project is the process and technology development of ingots and wafers with large format (formats (182x182 mm, 210x210 mm, possibly even 240x240 mm). The production of large ingots and large wafers requires further development of the crystallization systems, the process control, the mechanical processing of the ingot and bricks and ultimately also the qualification tools for the manufactured bricks and wafers. The focus of the sub-project at Freiberg Instruments is on the further development of lifetime measurements using MDP technology for large brick formats.
2021/03/01 – 2024/02/29
In this project a fast, contactless characterization tool based on THz is developed for the measurement of doping density, sheet resistance and layer thickness of thin semiconductor layers.
2021/04/01 – 2024/03/31
In the "SALSA" project, the inline measurement technology required for quality assurance and process control as well as quality assurance concepts are to be developed, optimized and techno-economically evaluated especially for progressive solar cell technologies such as the heterojunction route and the TOPCon route. The focus of Freiberg Instruments is on further development of their inline lifetime measurement abilities using MDP for HJT and TOPcon technology. The main tasks are: (1) System optimization for TopCon and HJT (inline - MDPlinescan, offline - MDPmap) (2) Identification of suitable excitation conditions in different manufacturing stages (TOPCon / HJT) (3) Detectability of defects in selected process stages (4) Development of a concept for an optimized MDPline scan system
Dr. Nadine Schüler (schueler@freiberginstruments.com)
2021/01/01 – 2022/12/30
So far, there are no universally applicable compact SPV spectrometers (SPV: surface photovoltage) available on the market with which practically any photoactive materials and semiconductors can be examined. The aim of this project is to develop a compact SPV spectrometer. With the help of our innovative SPV spectrometer and the measurement set-up for which a patent has been applied, charge separation, electronic transitions and diffusion lengths should be characterized contactless and with unprecedented sensitivity over a very broad spectral range from deep UV to near infrared.
In accordance with the complementary strengths of the project partners, the focus of Freiberg Instruments is on device development and production of the demonstrator, of HZB on method development, development of critical components, validation and tests, and HZG on simulation and development of analysis and simulation software for SPV.
Technology transfer PIDcon bifacial
2020/07/01 – 2020/12/31
In this project, the novel technology for testing bifacial solar cells for their sensitivity to potential-induced degradation (PID) is to be transferred from the Fraunhofer Center for Silicon Photovoltaics CSP to Freiberg Instruments GmbH and adapted into a marketable product. The Fraunhofer CSP has applied for a patent for a novel process (process and arrangement for testing solar modules or solar cells for potential-induced degradation) and will transfer this knowledge to Freiberg Instruments.
This project is funded by SAB and the EU.
QualiZell mess-ODNP
2019/11/01 – 2021/10/30
In cooperation with the technical university Bochum, Freiberg Instruments is developing a tool for ODNP measurements, a combination of EPR and NMR for the investigation of water dynamics and protein function. This project is funded within the ZIM network “Qualitätskontrolle Zelltherapie” (https://www.qualitaetskontrolle-zelltherapie.de/) by ZIM and the German government.
µTHIN
2019/09/01 – 2021/08/31
The objective of this project is to develop a sensor for sheet resistance measurements on thin films of e.g. GaN on Si via microwave detection. Furthermore, the MDP technology will taken to its next level concerning the time resolution, sensitivity and mapping possibility at different temperatures. The project partner the technical university Freiberg, is correlating the results of the new sensor and the improved MDP with PL and Raman measurements to gain new insights in the interpretation of the measurements results.
This project is funded out of the EFRE fond of the EU.
Advancement of Omega-Scan technology for different applications
2018/01/01 – 2020/12/31
Freiberg Instruments is further advancing its Omega-Scan technology for orientation of single crystals for different applications as orientation of diamond and other wide bandgap semiconductors, epitaxial layers, turbine blades and quartz.
The project is funded by the SAB and the EU.
Dr. Nadine Schüler (schueler@freiberginstruments.com)Dr. Hans-Arthur Bradaczek (bradaczek@freiberginstruments.com)
Freiberg Instruments takes part in a project with the goal to develop a method to predict PID recovery and hence the efficiency of a module. Freiberg Instruments is further developing its tool PIDcheck for the PID test of modules in free field and its recovery.
The project is funded by BMWi.
2017/05/01 – 2020/04/30
Smart processes – process technology for smart materialsMSM-production and material characterization
Freiberg Instruments is investigating the applicability of x-ray diffraction methods for crystallographic orientation determination on MSM single crystals (Magnetic Shape Memory) in subproject 2 "Process chains for the production of MSM actuator sticks". In the case of a positive evaluation, the closer connection to the subsequent processing steps will be examined and the determination process will be automated.
The project is funded by the BMBF within the Funding project “Zwanzig20”.
2017/01/01 – 2019/12/31
The overall objective of this project is to optimize the production processes of block silicon under industrial conditions with the help of fast and novel methods of quality assessment of bricks and wafers and thus to increase the quality of silicon wafers produced therefrom. This is to be demonstrated by a highly efficient industrial solar cell structure. Freiberg Instruments cooperates in this project with 7 partners from industry and Fraunhofer society.This project is funded by BMWi.
Contact person:Dr. Nadine Schüler (schueler@freiberginstruments.com)
2013/11/01 – 2017/04/30
The aim of this project is the evaluation of different metrology components for 450 mm wafers. Freiberg Instruments is delivering a measurement head for high resolution lifetime measurements in this project.
Dr. Kay DornichE-Mail: dornich@freiberginstruments.com
2015/12/01 – 2018/11/30
The objective of this project is to evaluate and improve the cutting edge characterization and technology for the german photovoltaic industry. The main focus are inline metrology tools and the prediction of solar cell efficiency by means of different measured parameters.
Freiberg Instruments is involved in this project with its inline metrology tool MDPinline. The aim is to improve the possibilities of solar cell efficiency prediction via lifetime measurements on wafers after different process steps. Further more typical errors in different process steps are investigated to enable an automatic detection.
This project is supported by BMWi.
Dr. Nadine SchülerE-Mail: schueler@freiberginstruments.com
2016/01/01 – 2018/12/31
This project involves Freiberg Instruments and the TU Freiberg and has the goal to improve the scientific tool MDPmap for the measurement of wide bandgap semiconductors. This includes
Improvement of the time resolution, in order to be able to measure also small lifetimes (> 10 ns)
Improvement of the sensitivity
Enhancement of temperature range up to 800 K for the investigation of deep defects
2016/03/07 – 2017/06/06
This is a funded technology transfer project, in which Freiberg Instruments in cooperation with the Fraunhofer Institute CSP in Halle is developing a PID test tool for the test of modules in free field.
This project is funded by the SAB and the EU.
µPCD/MDP (QSS)
PID
X-ray diffraction
Projects
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