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Wafer XRD / 200, 300

for fully automated sorting, sample crystalline orientation, sample dimension, optical notch/flat and edge profile determination and more

Exclusively through Malvern Panalytical

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Materials

With Wafer XRD, a wide variety of materials can be precisely analyzed. Thanks to their flexibility and performance, our systems meet even the most demanding requirements.

Si SiC Quartz GaN GaAs AIN InP Al₂O₃ (sapphire) and more

Features & Benefits

  • Fully automated wafer handling and sorting system (eg: cassette to cassette)

  • Crystal orientation and resistivity measurements

  • Optical determination of geometric features (notch position, notch deep, notch opening angle, diameter, flat position and flat length) of wafers

  • Distance measurement for unpolished wafers and mirroring surfaces

  • MES and/or SECS/GEM interfaces

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Fully automated wafer sorting and handling system

Fully automated wafer sorting and handling system

Applications

Automatic Wafer Sorting

To ensure the exceptional performance required for semiconductors, every wafer must undergo thorough testing. The Omega-Scan method, known for its speed and precision, is ideal for fully…

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Wafer XRD – Exclusively through Malvern Panalytical

This product is distributed by our trusted partner.

Contact for demo

Technologies

Omega-scan

Ultra-Fast Orientation Measurement for Single Crystals

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Theta-scan

Precision X-ray Method for Single Crystal Orientation

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Software

XRDStudio

Multiple Operating ModesOperator Mode: Designed for fixed measurement parameters, ensuring a safe and streamlined workflow. Administrator Mode: Allows for the creation and modification of…

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Wafer XRD – Exclusively through Malvern Panalytical

This product is distributed by our trusted partner.

Contact for demo