Resistivity

High-Precision Resistivity Mapping

Advanced resistivity mapping is essential for semiconductor quality control across materials like SiC, GaN, InP, and more. Using eddy-current sensing, it enables non-contact, high-precision measurements with excellent repeatability (σ < 0.15%), even on complex shapes such as wafers, boules, and ingots. Integrated distance and temperature sensors ensure stable, accurate results by compensating for external and material-related variations.

Automation in resistivity mapping has significantly increased throughput and reduced manual intervention. With X-Y mapping capabilities and multi-point measurement resolution as fine as ±0.1 mm, these systems are optimized for both research labs and high-volume manufacturing. Easy calibrating routines and compatibility with industry standards like SEMI MF 673 help streamline setup and maintain long-term system performance.

Combining high sensitivity, automation, and broad material compatibility, this technology supports a wide range of semiconductor applications—helping manufacturers improve yield, accelerate development, and scale with confidence.