HR-SPS with a variable energy excitation source

High sensitivity, high resolution surface photovoltage spectroscopy (SPS) measurement instrument for advanced material research and development and QA/QC inspection.

Note: Tentative specifications and information. Specifications are subject to changes.

Features of HP-SPS variable

Sensitivity: μV sensitivity and more than 7 orders of magnitude signal height resolution
Measurement speed: < 5 minutes per point for a 150 mm wafer with 1 mm resolution
Time resolution: 10 ns up to 100 ms
Optical head: laser driven light source with adjustable intensity and wavelength output between 200 and 3000 nm light. Spectral width < 10 nm.
Reliability: Bench top instrument with build in monochromator for high reliability and uptime > 99%

Configuration options

  • Pulse width and height modulation

  • Integrated heating stage (20–250 °C)

  • Spot size variation

  • Bias light

  • Resistivity measurement (wafers)

  • Reference wafer (Si)

Flexible mapping tool for R&D or production monitoring

The HR-SPS product with a variable energy excitation source is designed on the same basis as the HR-SPS product with fixed excitation sources. It is a compact bench top contactless electrical characterization tool for offline production control or R&D, measuring the surface photovoltage (SPV) of a sample over a wide injection range in steady state or short pulse excitation and in a continuous sweep over a wide range of wavelengths. This enables true spectroscopy measurements of any photoactive sample to be made in a reliable way. Automated sample recognition and parameter setup allows an easy adaption to a large variety of different samples comprising epitaxial layers and wafers after various processing steps ranging from as-grown material to finished device.

Technical specifications

sample sizepowder samples and up to 200 mm diameter
excitationlaser driven light source
materialany photoactive material (contact us for consultation on your material)
measurablestime-resolved and phase modulated surface photovoltage measurements
dimensions680 x 680 x 680 mm, weight: app. 100 kg
power100-250 V, 50/60 Hz, 5 A