HR-SPS with fixed energy excitation sources

Flexible mapping tool for R&D or production monitoring

The HR-SPS product platform is designed on the same basis as the popular MDPmap product series. It is a compact bench top contactless electrical characterization tool for offline production control or R&D, measuring the surface photovoltage (SPV) of a sample over a wide injection range in steady state or short pulse excitation. Automated sample recognition and parameter setup allows an easy adaption to a large variety of different samples comprising epitaxial layers and wafers after various processing steps ranging from as-grown material to finished devices.

The major advantage of HR-SPS with fixed energy excitation sources is its high flexibility, which for example enables the integration of up to four lasers in the measurement head, either for injection level dependent SPV measurements ranging from very low to high injection or extracting depth information by using different laser wavelengths. Bias light facility is included as well. A customer defined calculation with different maps is possible as well as an export of primary data for further evaluation. For standard metrology tasks a predefined recipe enables routine measurements by only pushing one button.

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Technical specifications