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Electrical semiconductor characterization
Luminescence dating, research, dosimetry and more
Contamination monitor, beta-aerosol monitor, dose rate meter and more
Mono- and Multi-crystalline wafer lifetime measurement device
State of the art system for topographic electrical characterization of multicrystalline bricks in fabs with high throughput....
Production integrated high speed wafer mapping of carrier lifetime. Single wafer topograms in less than one second a wafer.
Low cost table top lifetime measurement system for characterization of a variety of different silicon samples at different...
Mono- and Multi-crystalline wafer and brick lifetime measurement device
Flexible OEM unit for lifetime measurements at a variety of different samples ranging from mono- to multicrystalline silicon...
Microwave Detected Photo Induced Current Transient Spectroscopy
The minority carrier life time is sensitive for all kinds of electrically active defects in semiconductors and is therefore...
MDP is an advanced technology with a so far unsurpassed combination of sensitivity, speed and resolution for fab and lab...
for quality control of bifacial PERC/PERC+ solar cells and more
portable in field PID tester for solar modules
user friendly and advanced operating software
The PIDcon devices are designed to investigate the PID susceptibility for production monitoring of solar cells as well as tests...
Learn more about the reasons for PID and the how the susceptibility of solar cells, mini modules and encapsulation materials can...
For ultra-fast crystal orientation and rocking curve measurements
Flexible diffractometer for ultra-fast Omega Scan orientation determination
Smart diffractometer for ultra-fast Omega-scan of small samples.
Robust XRD equipment for fully automated in-line testing & alignment
for blanks, wafers & bars (AT, SC, TF, etc.)
three generations of X-ray engineers
in industrial production, R&D and more
discover the most convenient way of measuring orientation of single crystals
Our quality management system is an integrated process-oriented system with ISO 9001 certification.
For microelectronics, and other microstructure technologies, crystalline wafers are the most important substrate material. In high-throughput applications like wafer sorting and quality control, the Omega Scan plays its speed advantage.
To gain the high performance that is expected from a semiconductor, every wafer shall be tested. With its high speed and precision, the Omega-scan method is best suited for fully automated in-line solutions of XRD. This includes characterization of the surface tilt vector and an in-plane direction, for instance the perpendicular of the flat as well as automated detection of flat- or notch plus their measures.
For all established wafer materials and orientations, Omega Scan solutions are available. The most common material is quartz, where the combination with mapping comes in handy. The high-quality areas of the wafer are identified prior to cutting blanks.
During wafer production, heat occurs that can bend the thin wafer. An additional sensor can determine warp and bow of the wafer (see Fig. 1 & 2).