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Quartz Wafer XRD

Wafer Analysis using X-Ray Diffractometer

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For analysing: Quartz Wafer orientation and sorting in a modular package

  • Modular design allows future automation upgrade

  • Sample size from 20 x 20 mm to 80 x 80 mm (automatic sample handling)

  • Up to 350 wafers/h throughput at standard sorting accuracy

Materials

Quartz and more

Features & Benefits

  • Fully automated quartz wafer analysing machine

Samples:

  • 20 x 20 mm up to 80 x 80 mm (automatic sample handling)

  • Round, rectangular & square
     

  • Mapping option for spatial quality check

  • Modular design allows future automation upgrade

  • Standard sample holders for input/output: cassettes or stacks

  • Sorting function available

  • Throughput: up to 350 wafers/h at standard sorting accuracy

Applications

Automatic Wafer Sorting

To ensure the exceptional performance required for semiconductors, every wafer must undergo thorough testing. The Omega-Scan method, known for its speed and precision, is ideal for fully…

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Technical Data

  • X-ray tube: 1.5 kW, Cu anode

  • Power supply: 200 – 230 V, 16 A, single phase

Technologies

Omega-scan

Ultra-Fast Orientation Measurement for Single Crystals

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Theta-scan

Precision X-ray Method for Single Crystal Orientation

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Accessories & Options

  • MES interface for Industry

  • Mapping (wafers) 

  • Stereographical projection and more

Software

XRDStudio

Multiple Operating ModesOperator Mode: Designed for fixed measurement parameters, ensuring a safe and streamlined workflow. Administrator Mode: Allows for the creation and modification of…

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Get in touch

Do not hesitate to contact us – we are available to assist you with any inquiries or requests.

Use our inquiry tool or reach out via email:
sales@freiberginstruments.com