Efficient Crystal Orientation and In-Plane Direction Measurement with Omega Scan
The Omega Scan provides a complete crystal orientation in a single measurement, allowing for the direct identification of in-plane directions. This feature is particularly useful for marking in-plane directions or verifying the orientation of flats and notches.
During wafer implantation and photolithography, the flat or notch acts as an orientation marker. After processing, the wafer contains hundreds of chips that must be separated by cleaving. Correct alignment of these chips with a lattice plane is crucial for easy cleaving, making it necessary to check the position of the flat or notch. This requires precise measurement of in-plane components.
Unlike the more complex or imprecise Theta Scan method, Omega Scan accurately measures the complete orientation in one go. The system also allows for easy adjustment of any in-plane direction to a specific position defined by the user, simplifying tasks such as flat orientation marking. For high-throughput applications, automated measurement solutions are available, ensuring maximum efficiency.
Related Technologies: Omega-scan
