Automatic X-Y mapping stage

for wafers and ingots

Automatic X-Y mapping stage

The mapping stage allows to explore the whole sample surface using a controlled grid pattern. An Omega/Theta XRD can easily accommodate the additional xy-positioning stage on top of the turntable. The sample surface can be scanned according to a user-defined grid. The minimum grid spacing is about 1 mm, due to the size of the X-ray spot on the sample.

The mapping stage can be combined with Omega Scan to get a crystal orientation mapping or with the rocking curve measurement to get a mapping of distortions on the surface. Software packages for display and analysis are available.

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