Highlights
Established Omega-scan method
Highest precision
Measurement speed: < 5 secs/sample
Easy integration into process line
MES and/or SECS/GEM interfaces
Typical standard deviation tilt (example: Si 100): < 0.003 °, minimum < 0.001 °
The Omega/Theta X-ray diffractometer is a fully automated vertical three axes diffractometer for orientation determination for various crystals using Omega-Scan and Theta-Scan methods and rocking curve measurements. The large and spacious design can accomodate samples and sample holders up to 450 mm in length and up to 30 kg weight.
All measurements are automated and can be accessed from the user-friendly software interface. Using the Omega Scan, the complete lattice orientation can be determined in on crystal rotation (5 seconds). The Theta Scan is more flexible, but results only in one orientation component per scan.
The tilt angle can be determined with very high precision; up to 0.001° using the Theta Scan. For all other crystal directions the precision depends on the angular difference to the surface perpendicular.
The system is modular and has been equipped with many different extensions for special purposes like shape or flat determination, mapping and diverse sample holders. The sample tilt is detected by an optical measurement, and can be used to correct the resulting orientation.
