Omega/Theta XRD

for ultra-fast crystal orientation, crystal alignment in production, quality control, rocking curve measurements, material research and more


Si | SiC | AlN | GaAs | Quartz | LiNbO3 | BBO and 100 more materials


Established Omega-scan method

  • Highest precision

  • Measurement speed: < 5 secs/sample 

  • Easy integration into process line

  • MES and/or SECS/GEM interfaces

  • Typical standard deviation tilt (example: Si 100):   < 0.003 °, minimum < 0.001 °

The Omega/Theta X-ray diffractometer is a fully automated vertical three axes diffractometer for orientation determination for various crystals using Omega-Scan and Theta-Scan methods and rocking curve measurements. The large and spacious design can accomodate samples and sample holders up to 450 mm in length and up to 30 kg weight.

All measurements are automated and can be accessed from the user-friendly software interface. Using the Omega Scan, the complete lattice orientation can be determined in on crystal rotation (5 seconds). The Theta Scan is more flexible, but results only in one orientation component per scan.

The tilt angle can be determined with very high precision; up to 0.001° using the Theta Scan. For all other crystal directions the precision depends on the angular difference to the surface perpendicular.

The system is modular and has been equipped with many different extensions for special purposes like shape or flat determination, mapping and diverse sample holders. The sample tilt is detected by an optical measurement, and can be used to correct the resulting orientation.

Add ons

  • Laser scanner for sample shape measurement

  • Photographic camera and image processing for flat and notch detection

  • Additional sample rotation axis for 3D mapping

  • Secondary channel-cut collimator (analyzer)

  • Equipment for sample adjustment

Single crystal diffractometer

  • Fully automated complete lattice orientation measurement of single crystals

  • Ultra-fast crystal orientation measurement using Omega-scan method

  • Automated rocking-curve measurement

  • Angular resolution of the diffractometer: 0.1 arc sec.

  • Sample size up to 450 mm

  • Appropriate for production quality control and research

User friendly and cost effective

  • Convenient sample handling and easy to operate

  • Advanced, user-friendly software

  • Low energy consumption and operating costs

Modular design and flexibility

  • Various upgrade options

  • Customization to the users' requirements

Contact Malvern Panalytical for demo and quotation of Omega / Theta XRD.

Contact and Sales

Contact Malvern Panalytical for demo and quotation of Omega/Theta XRD