Skip menu

Fast and reliable resistivity mapping tool for highly doped samples

  • Exceptional Repeatability (sigma < 0.15%)

  • Advanced Stability Sensors

  • Seamless Inline Integration and Effortless Calibration

Materials

The RESmap is specialized on highly doped materials

Si SiC and more

Features & Benefits

< 0.15 %

repeatability

Resistivity
1–150

mOhm cm

throughput
> 20

Wafer per hours

± 5 %

accuracy

± 5 %

accuracy

  • Exceptional Repeatability
    Achieves ultra-high precision with a standard deviation of less than 0.15%, ensuring consistent and reliable results.

  • Advanced Stability Sensors
    Features an integrated distance and temperature sensor, maintaining superior measurement accuracy and stability

  • Seamless Inline Integration
    Available as a fully automated, compact sensor, ideal for smooth and efficient inline applications

  • Effortless Calibration
    Enables easy and stable calibration using a dedicated sample set, reducing setup time and ensuring long-term reliability

  • Contact free measurement and imaging of the resistivity
    High frequency eddy current sensing principle with integrated IR temperature sensor to correct for temperature variations of the sample

  • Material form factor
    Flat or slightly curved wafers, boules, ingots slabs, blanks and thin films

  • X-Y placement resolution ≥ 0.1 mm

  • Edge exclusion 5 mm

  • Reliability
    modular, compact bench top instrument design for high reliability and uptime > 99%

  • Measurement time
    < 3s for the measurement and < 1s between measurements

  • Measurement speed
    < 30s for a 200 mm wafer/ingot, 9 points

Applications


Interested? Our experts are happy to assist you.

Get in touch!

Contact us now!

Prepared for Automationdifferent platforms available
Measurement method conformswith SEMI MF673
Data and data validity checkedusing NIST standards
Accuracy over calibrationinterval ±1%
Integrated IR temperature sensor (±0.1°)to allow reporting resistivity at a standard temperature, different from the actual temperature of the sample
Sample thickness correctionfor samples where the penetration depth of the high frequency signal is larger than the penetration depth
Power requirements100-250 VAC, 5 A
Dimensions (w/h/d)465 x 550 x 600 mm
Software controlstandard PC with Window 10 or latest, 2 Ethernet ports

Technologies


User-friendly and advanced operating software with

  • Resistivity measurement recipes

  • Export/import functions and raw data access

  • Multi-level user account management

  • Overview over all performed measurements

  • Mapping options (line, cross, star, full map, topography, user defined pattern)

  • Package of analysis functions; statistics, variance analysis, temperature correction functions and library

  • Remote accessibility; Internet based based system allows remote operation and technical support from anywhere in the world

 

Get in touch

Do not hesitate to contact us – we are available to assist you with any inquiries or requests.

Use our inquiry tool or reach out via email:
sales@freiberginstruments.com