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Skip breadcrumb navigation Breadcrumb Freiberg Instruments Products Luminescence Dating and Dosimetry myOSLraser myOSL raser Most advanced OSL system for dosimetry Exclusively through RadPro International Contact for demo TL/OSL series myOSLraser 2.0 Learn more TL/OSL series myOSLraser 4.0 Learn more myOSLraser – Exclusively through RadPro International This products are distributed by our trusted partner. Contact for demo

Skip breadcrumb navigation Breadcrumb Freiberg Instruments Products Luminescence Dating and Dosimetry myOSLautomatic myOSL automatic Automation units for myOSLraser 4.0 Exclusively through RadPro International Contact for demo TL/OSL series myOSL 4000 Learn more TL/OSL series myOSLautomatic 500 Learn more TL/OSL series myOSLautomatic 50 Learn more myOSLautomatic – Exclusively through RadPro International This products are distributed by our trusted partner. Contact for demo

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Raman Sensor RAMSES RAMSES-4-CE Learn more Discover more of the RAMSES series Applications Learn more Get in touch Do not hesitate to contact us – we are available to assist you with any inquiries or requests. Use our inquiry tool or reach out via email: sales @ freiberginstruments.com

RAMSES Aplications Advanced identification of polymers and semiconductors Learn more

Double Prism Monochromator Unlock the Future of Spectral Analysis: The DPM series Experience unparalleled optical performance with our state-of-the-art Wide-Range Double Prism Monochromator — engineered to deliver exceptional spectral precision, broad wavelength coverage, and ultra-low stray light levels. Designed for demanding applications in photonics, analytical chemistry, and materials science, this advanced system features dual-prism technology that ensures seamless tunability and high throughput across an extended spectral range. Whether you're an experienced researcher or just beginning your scientific journey, the monochromator’s user-friendly interface and robust design make it easy to integrate into any workflow — boosting productivity and accelerating innovation. DPM series DPM100 Learn more With its double prism design, the DPM100 outperforms standard grating monochromators by offering a broader spectral range from UV to NIR – ideal for high-precision and flexible spectroscopy. Ing. Thanga Kumar Sales Director Discover more of the DPM series Publications Learn more Get in touch Do not hesitate to contact us – we are available to assist you with any inquiries or requests. Use our inquiry tool or reach out via email: sales @ freiberginstruments.com

Resistivity Mapping Accurate Material Analysis for Semiconductor Quality Control: The RES series Advanced resistivity mapping is essential for semiconductor quality control across materials like SiC, GaN, InP, and more. Using eddy-current sensing, it enables non-contact, high-precision measurements with excellent repeatability (σ < 0.15%), even on complex shapes such as wafers, boules, and ingots. Integrated distance and temperature sensors ensure stable, accurate results by compensating for external and material-related variations. Automation in resistivity mapping has significantly increased throughput and reduced manual intervention. With X-Y mapping capabilities and multi-point measurement resolution as fine as ±0.1 mm, these systems are optimized for both research labs and high-volume manufacturing. Easy calibrating routines and compatibility with industry standards like SEMI MF 673 help streamline setup and maintain long-term system performance. Combining high sensitivity, automation, and broad material compatibility, this technology supports a wide range of semiconductor applications—helping manufacturers improve yield, accelerate development, and scale with confidence. RES series RESmap Learn more The market launch of RESmap was a special milestone – a game changer for the semiconductor industry. Dr. Christian Hagendorf Key Account Manager Get in touch Do not hesitate to contact us – we are available to assist you with any inquiries or requests. Use our inquiry tool or reach out via email: sales @ freiberginstruments.com

RESmap Applications High precision Resistivity Measurement Learn more

High precision Resistivity Measurement on highly doped semiconductors Aim Measuring resistivity in highly doped semiconductors is crucial for several reasons: Quality control and Doping density verification Device performance prediction Extraction of material parameters as mobility and carrier concentration Process development (e.g. ion implantation) and simulation of doping models Detection of contaminations, process drift and inhomogeneities and defects as the growth facet in SiC for the Laser splitting process of SiC Hence precision and reproducibility are critical for advanced semiconductor applications. Solution The RESmap from Freiberg Instruments enables high-precision mapping of all kinds of highly doped materials (Si, SiC and more) in a range of 1 to 100 mΩcm with an unsurpassed repro-ducibility (σ < 0.15 %) due to the integrated distance and temperature sensors and the sensitive measurement head. This compact measurement head can also be used as a hand-held tool, it is available in a fully automated version with robot handling or can be integrated into the production line. Application example Figure 1 shows an exemplary mapping of the resistivity of a SiC raw wafer. The edge exclusion is appr. 5 mm. It is well known that the measured resistivity depends on the sample temperature, but also on the ambient temperature. Hence two T sensors are integrated in the measurement head. Figure 2 shows 1000 repeats of a resistivity measurement at a thick SiC boule (> 1 mm). The measurement head was driving in the home position after every measurement and the complete procedure took around 6 hours. In this time the ambient temperature changed and this test shows nicely how well the T com-pensation algorithm works. A reproducibility with s < 0.15 % is achieved with this T compensation algorithm. Figure 1: Example of a resistivity map of a SiC wafer For the cold laser splitting process for SiC also the crystal orientation is extremely important. Freiberg Instruments offers a lot of solutions for a fast and precise measurement of the crystal orientation, which can be tailored to your individual process line. Please check out our XRD solutions. Figure 2: 1000 repeats with movement to home position; with (σ < 0.15 %) and without temper-ature compensation (σ < 0.21 %) Figure 3: average of a 5 mm map of a 6’’ boule, measured 18 times on different days and differ-ent times, σ = 0.15 % Figure 4: dynamic temperature drift: sample was placed at a cold spot and measured during the warm up, the experiment took about 10 mins Matching Products RES series RESmap High-Precision Resistivity Mapping System for Accurate Material Analysis Learn more Get in touch Do not hesitate to contact us – we are available to assist you with any inquiries or requests. Use our inquiry tool or reach out via email: sales @ freiberginstruments.com