Skip breadcrumb navigation Breadcrumb Freiberg Instruments Products Resistivity Mapping RESmap RESmap High-Precision Resistivity Mapping System for Accurate Material Analysis Interested? Get in touch! Contact now Product Sheet Skip menu Quick navigation Features Applications Specifications Technology Software Contact Fast and reliable resistivity mapping tool for highly doped samples Exceptional Repeatability (sigma < 0.15%) Advanced Stability Sensors Seamless Inline Integration and Effortless Calibration Materials The RESmap is specialized on highly doped materials Si SiC and more Features & Benefits Sigma < 0.15 % exceptional repeatability Resistivity 1–100 mOhm cm Throughput > 20 Wafers/hour ± 5 % accuracy with temperature correction ± 5 % accuracy with temperature correction Exceptional Repeatability Achieves ultra-high precision with a standard deviation of less than 0.15%, ensuring consistent and reliable results. Advanced Stability Sensors Features an integrated distance and temperature sensor, maintaining superior measurement accuracy and stability Seamless Inline Integration Available as a fully automated, compact sensor, ideal for smooth and efficient inline applications Effortless Calibration Enables easy and stable calibration using a dedicated sample set, reducing setup time and ensuring long-term reliability Contact free measurement and imaging of the resistivity High frequency eddy current sensing principle with integrated IR temperature sensor to correct for temperature variations of the sample Material form factor Flat or slightly curved wafers, boules, ingots slabs, blanks and thin films X-Y placement resolution ≥ 0.1 mm Edge exclusion 5 mm Reliability modular, compact bench top instrument design for high reliability and uptime > 99% Measurement time < 3s for the measurement and < 1s between measurements Measurement speed < 30s for a 200 mm wafer/ingot, 9 points Bull´s eye chart management for maximum accuracy and precision Measurement principle of eddy current sensor Applications High precision Resistivity Measurement Measuring resistivity in highly doped semiconductors is crucial for several reasons:Quality control and Doping density verification, Device performance prediction, Extraction of material… Learn more RESmap delivers unmatched repeatability, stability and accuracy – making it the trusted choice for precise resistivity mapping across a wide range of materials. Dr. Christian Hagendorf Key Account Manager Interested? Our experts are happy to assist you. Get in touch! Contact us now! Prepared for Automation different platforms available Measurement method conforms with SEMI MF673 Data and data validity checked using NIST standards Accuracy over calibration interval ±1% Integrated IR temperature sensor (±0.1°) to allow reporting resistivity at a standard temperature, different from the actual temperature of the sample Sample thickness correction for samples where the penetration depth of the high frequency signal is larger than the penetration depth Power requirements 100-250 VAC, 5 A Dimensions (w/h/d) 465 x 550 x 600 mm Software control standard PC with Window 10 or latest, 2 Ethernet ports Download Product Flyer PDF (167 KB) Technologies Minority carrier lifetime The measured effective lifetime is composed of the bulk lifetime and surface lifetime, which depends on the surface properties of a sample. Hence the surface has to be passivated, if you want… Learn more Photoconductivity When light of sufficient energy is absorbed by a semiconductor, the number of free electrons and holes changes and raises the electrical conductivity of the semiconductor. This increase is… Learn more Resistivity The electrical resistivity directly depends on the density of the semiconductor and is therefore a useful parameter to monitor doping profiles and homogeneity. The lifetime and diffusion length… Learn more Mobility The mobility is a quantity related to the drift velocity of electrons or holes in an applied electric field across a material. The mobility depends on different scattering processes that can… Learn more Diffusion length Learn more Defect properties The properties of a defect and its impact on the material quality can be described by three main parameters:defect concentration NT, capture cross sections for electrons and holes σn, σp,… Learn more Lifetime simulations From the simulated time dependent carrier concentrations the photoconductivity can be calculated using the mobility model of DORKEL and LETURCQ [2] . The minority carrier lifetime can be… Learn more Simulation of carrier profiles The measurement of thick samples as bricks leads to new questions and problems. One of these questions is how the carrier profiles that develops in a sample effect the lifetime measurements. To… Learn more Microwave detected photoconductivity (MDP) The novel method MDP is well suited for both, defect investigation by e.g. injection dependent minority carrier lifetime measurements, as well as mapping of wafers or even bricks for inline… Learn more Comparison to µ-PCD and QSSPC Besides MDP the two most important contact less lifetime measuring methods are QSSPC (quasi steady state photoconductivity) and µ-PCD (microwave detected photoconductive decay). Currently one… Learn more MD-PICTS MD-PICTS is a modification of MDP, where temperature dependent measurements of the defect part of the transient are accomplished. This allows for a spatially resolved defect characterization.… Learn more Penetration depth of different laser wavelength in silicon The microwave detected photoconductivity measures the photoconductivity after the irradiation of the sample with light. Usually the light should have an energy that is higher than the bandgap,… Learn more Materials Electrical properties and defects of a large variety of semiconductor materials, devices and dielectric materials can be investigated contact less and destruction with our advanced method MDP.… Learn more User-friendly and advanced operating software with Resistivity measurement recipes Export/import functions and raw data access Multi-level user account management Overview over all performed measurements Mapping options (line, cross, star, full map, topography, user defined pattern) Package of analysis functions; statistics, variance analysis, temperature correction functions and library Remote accessibility; Internet based based system allows remote operation and technical support from anywhere in the world Get in touch Do not hesitate to contact us – we are available to assist you with any inquiries or requests. Use our inquiry tool or reach out via email: sales @ freiberginstruments.com
